Used Applied Materials (AMAT) 300mm CenturaAP HDPCVD For Sale

Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 50771 - avatar

Yong H. L.

Member since: March 2013

More listings by this seller

Make an Offer Ask the Seller a Question
Name:
Applied Materials (AMAT) 300mm CenturaAP HDPCVD
Listing Reference:
490538
Price:
Contact Me for Price
Location:
South Korea
Age:
2005
Description:

AMAT 300mm(12") CenturaAP HDPCVD UltimaX / 2 Chambers.

1. Manufacture: Applied Materials
2. Product: AMAT CVD 300mm CenturaAP HDPCVD UltimaX
3. Wafer Size: 300mm ( 12" )
Vintage: 2005. 05.01
Factory Interface (FI) version : 5.3
Number of Load-ports : 3EA
FI Robot Type: Kawasaki w/Edge Grip & Pre-Aligner (Single Axis)
Mainframe Type: 300mm CenturaAP Mainframe
Vacuum Robot Type: VHP w/ 2 Ceramic Blades
LLKA: SWLL
LLKB: SWLL
Chamber Configuration
A: Ultima X HDP-CVD
B: Ultima X HDP-CVD
C: Blank
D: Blank
Process Chambers:
Ch#A/B: Ultima X HDP-CVD
Process: USG STI & IMD, PSVN
Gas Ring & Nozzle Type: 36 Ports & 1.76” ALN Nozzles
Cathode Type: 300mm Dual HE ESC
RPS Type: MKS Astron RPS
Turbo Pump Type: STP-XH3203P
Gate Valve Type: NorCal
RF Generator: TOP/SIDE - MKS ENI Spectrum (2Mhz, 11KW)
BIAS MKS ENI Spectrum (13.56Mhz, 11KW)
RF Match Box: Top/Side – Local Match, Bias – AE AZX72 Auto tune match Box
IHC Type: 20/20Torr Dual IHC
WTM Type: Wafer Temperature Monitor 4 Channel

Gas Pallet Configuration:
12 Stick Gas Pallets
1. N2 purge
2. O2: 400sccm
3. NF3: 400sccm
4. He: 600sccm
5. SIH4: 400sccm
6. H2: 1000sccm
7. AR:1000sccm
8. SiH4: 50sccm
9. He: 600sccm
10. NF3: 400sccm
11. NF3: 3000sccm
12. Ar: 3000sccm
13. N2 purge
Gas Panel Feed: Bottom
Exhaust: Bottom
MFCs: Unit 8565C Multiflow
Valve Type: Veriflo
Filter Type: Millipore
Controller Type: DeviceNet

Heat Exchanger
SMC Heat Exchanger: HOT/COLD LOOP - INR-498-011C X 2EA
Transfer Pump: Alcatel A100L iPUP X 1EA
Primary AC Rack: X 1EA
Facilities UPS Interface
Power Requirements: 200/208VAC, 3-Phase, 400A, 4-Wire, Frequency 50/60Hz

Used equipment can sell very quickly. Contact the seller asap to discuss this Applied Materials (AMAT) 300mm CenturaAP HDPCVD.

Make an Offer Ask the Seller a Question
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 50771 - avatar

Yong H. L.

Member since: March 2013

More listings by this seller

Make an Offer Ask the Seller a Question
Make the Seller an Offer

Make the Seller an Offer

* required field

$ (USD)

Sending an offer to the seller does not constitute a legally binding agreement to purchase the equipment. However, please only make an offer if you are seriously interested.

Your offer will be emailed to the seller immediately. We will email you their reply as soon as we receive it.

Ask the Seller a Question

Ask the Seller a Question

* required field

Your question will be sent to the seller immediately and we will email you as soon as they reply.