Used GaSonics Aura 1000 Ashing System For Sale

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Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 43773 - avatar

David S.

Member since: March 2011

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Name:
GaSonics Aura 1000 Ashing System
Listing Reference:
375623
Price:
Contact Me for Price
Location:
USA
Age:
2011
Description:

The GaSonics Aura 1000 single-wafer photoresist asher is an automated tool designed as a flexible downstream plasma photoresist removal system for high-volume wafer fabrication.

- Lowest cost of ownership asher, > 95% uptime, > 500 systems in production
- High throughput
- Very small footprint: 80cm (32") W, 80cm (32") L, 70cm (28") H
- Front and backside isotropic removal
- Downstream ashing for minimized device change
- 75mm - 150mm wafer capability
- Pick and place wafer handling
- Precise downstream endpoint detection
- Up to 4 MFC's
- Pressure control, option
- Closed-loop temperature control option
- SMIF compatible
- Touch screen option
- SECS II interface, multiple process step capability
- Variable lamp heating for temperature control
- Table top or floor/through the wall designs.

Typical Process Results:
- Ash rates: 2µ-5µ/min positive resist; > 8µ/min negative photoresist
- Uniformity: < 20%
- Selectivity to underlying films: > 1000:1
- Throughput: Up to 90 wph
- Particle Control: <0.05 p/cm2 0.3µm
- Damage control: <0.IV CV-shift for 250Å gate oxide.

Used equipment can sell very quickly. Contact the seller asap to discuss this GaSonics Aura 1000 Ashing System.

Make an Offer Ask the Seller a Question
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 43773 - avatar

David S.

Member since: March 2011

More listings by this seller

Make an Offer Ask the Seller a Question
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