Used IGC-Polycold /Novellus 2XCL-3 Loop Gas Chiller For Sale

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Stock:
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Seller:
Member ID 51461 - avatar

Andrea T.

Member since: September 2013

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Name:
IGC-Polycold /Novellus 2XCL-3 Loop Gas Chiller
Listing Reference:
508127
Price:
Contact Me for Price
Location:
USA
Age:
1997
Description:

Novellus 2XCL-3

a.k.

IGC-Polycold Systems PGCL-2 Closed Loop Gas Chiller Refrigerating System

Asset Tag: 176370

IGC Polycold Systems has been known for providing a complete line of closed-loop cryogenic refrigeration system for vacuum deposition, process heat transfer, and other applications.

The 2XCL-3 incorporate both a closed loop refrigerating system and a recirculating gad coolant system, which cools a gas stream using highly efficient refrigerant heat exchangers. The gas stream is recirculating, using any inert dry gas (such as nitrogen, helium, argon, or dry air) as the coolant medium.

Benefits:

- Enables higher wafer yields and consistent tool performance
- Inert gas cooling eliminates the risk of tool downtime and contamination
- Utilizes field-proven modules for unparalleled reliability while maintaining a small footprint
- Clean coolant has low cost or ownership and allows high temperature bake out without pressure buildup
- Offers easy serviceability and inherently reliable operation
- Reliable performance
- Long life, with low to no maintenance

Applications include:

The 2XCL-3 provides substrate cooling in a broad range of applications, such as cooling of Water Chucks in semiconductor process tools, thermal testing of electronics, and other applications where gas cooling offers specific advantages, including reduced operating cost and lower risk of tool downtime and contamination. It is possible to have temperature below 100°C.

Technical Specifications:

Heat Removal at -40°C Load Outlet 490 Watts
Flow Rate (SCFM) at 120 psig 20 SCFM
Time to Pre-Cool Heat Exchanger 45 minutes
Unit dimensions:
Width 558 mm (22 inches)
Depth 610 mm ( 24 inches)
Height 1880 mm (74 inches)
Weight 321 kg (710lbs)
Utilities:
Gas Source Nitrogen, Helium, Argon, etc.
Cooling Water, 15°C to 30°C Flow Rate 10 gpm
Normal Voltage 50 / 60 Hertz
Input Power, kw 8.5
Model Version 3

Send me an offer by email or phone.

Used equipment can sell very quickly. Contact the seller asap to discuss this IGC-Polycold /Novellus 2XCL-3 Loop Gas Chiller.

Make an Offer Ask the Seller a Question
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 51461 - avatar

Andrea T.

Member since: September 2013

More listings by this seller

Make an Offer Ask the Seller a Question
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