IGC-Polycold /N 2XCL-3 Loop Gas

Listing description

Novellus
2XCL-3

a.k.

IGC-Polycold Systems PGCL-2 Closed Loop Gas Chiller Refrigerating System

Asset Tag: 176370

IGC Polycold Systems has been known for providing a complete line of closed-loop cryogenic refrigeration system for vacuum deposition, process heat transfer, and other applications.

The 2XCL-3 incorporate both a closed loop refrigerating system and a recirculating gad coolant system, which cools a gas stream using highly efficient refrigerant heat exchangers. The gas stream is recirculating, using any inert dry gas (such as nitrogen, helium, argon, or dry air) as the coolant medium.

Benefits:

- Enables higher wafer yields and consistent tool performance
- Inert gas cooling eliminates the risk of tool downtime and contamination
- Utilizes field-proven modules for unparalleled reliability while maintaining a small footprint
- Clean coolant has low cost or ownership and allows high temperature bake out without pressure buildup
- Offers easy serviceability and inherently reliable operation
- Reliable performance
- Long life, with low to no maintenance

Applications include:

The 2XCL-3 provides substrate cooling in a broad range of applications, such as cooling of Water Chucks in semiconductor process tools, thermal testing of electronics, and other applications where gas cooling offers specific advantages, including reduced operating cost and lower risk of tool downtime and contamination.
It is possible to have temperature below 100°C.

Technical Specifications:

Heat Removal at -40°C Load Outlet
490 Watts
Flow Rate (SCFM) at 120 psig
20 SCFM
Time to Pre-Cool Heat Exchanger
45 minutes
Unit dimensions:
Width

558 mm (22 inches)
Depth

610 mm ( 24 inches)
Height

1880 mm (74 inches)
Weight

321 kg (710lbs)
Utilities:
Gas Source

Nitrogen, Helium, Argon, etc.
Cooling Water, 15°C to 30°C Flow Rate 10 gpm
Normal Voltage

50 / 60 Hertz
Input Power, kw
8.5
Model Version 3

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This equipment is located in US