MicroManipulato 6200 Probe Test

Listing description

MicroManipulator
6200 Probe Test Station
Used

The 6200 probe station is one of Micromanipulator's most popular probing station models. It is designed to provide an instrument that can in application in both high precision analytical probing and general probing task for a single die or packaged device.

Features and Benefits:

• Coaxial, coarse/fine stage controls with fast stage pullout
• Fast platen lift and lock (3 positions) with coupled microscope lift with adjustable delay
• Highly stable, vibration isolated microscope post
• 1" x 1" X, Y microscope translation
• Separate microscope lift and lock mechanism
• Platen fine lift (jackscrew drive) 0.3 µm per degree
• Rigid platen with webbed construction and linear lift accepts magnetic or vacuum based manipulators

System Components:
a. test station with fat stage pullout feature.
b. allows fast transition across wafer or easy loading of sample while maintaining precise positioning in probing area.
Platen:
a. large stainless steel (magnetic) platen surface
b. accepts up to 10 magnetic or vacuum based manipulators.
c. provides 10 BNC style or optional tri-axial probe signal strain reliefs.
Platen Control Features:
a. range of fine travel in 1.187" (30mm) with 1.187" (30mm) of microscope lift delay.
b. fine left resolution is 0.3 µm
c. fast lift view fast lift lever positioned at the left side of the probe station with 3 locking up positions.
d. Platen fine left allows submicron adjustment of probe or probe card vertical position.

X-Y Stage Movement:
a. Convenient fine and coarse stage movement in X and Y axis, with fast pullout stage feature for changing devices.

Vacuum stage:
a. 6-inch wafer chuck gold plated
b. 360° chuck Theta rotation with coarse or fine control
c. Chuck surface is electrically connected to a BNC connector at left rear of probe station.

d. Single point grounding standard.
e. Flatness equal ? 12 microns
f. Electrical isolation exceeds 1010 Ohms at 500 x DC(standard chuck)

Specifications:
Stage:

X and Y axis range 6" x 6" (150nm x 150nm)

Resolution

40 µm/degree coarse resolution

1.7 µm/degree fine resolution
Microscope:

1" x 1" x 2", X,Y, and Z axis range

Standard Precision (programmable) ± 2.5 µm Repeatability & accuracy

Advanced Precision (programmable) ± 1.5 µm
Repeatability & Accuracy

Resolution

0.1 µm resolution, motorized or programmable

12.5 µm resolution, standard manual

1.7 µm resolution, high resolution manual

Platen

1" (25.4mm) Z axis range

1" (25.4mm) Microscope life delay

0.3 µm/degree fine lift resolution

Chuck

± 12 µm Surface flatness

360 degrees Theta range

Facility Requirements:

Power 100-240 v AC

1.0/0.5 ampere

60/50 Hz

Vacuum
20 inch Hg

Test Station Dimensions:

Footprint (width x depth)

22.75" x 23.35" (57.7 x 59.3cm)

Weight
246LB

Construction:

Material: machine aluminum plate and magnetic stainless

This equipment is located in US