RF Plasma Produ RF-5S

Listing description

Custom Plasma Extraction System CONTROL PANEL COMPONENTS: •(3) RF Plasma Products RF-5S RF Generators s/n S1364-10434(installed); S1365-10434(installed); S1363-10434(loose), •RF Plasma Products CEX-4 Phase Shifter s/n 182-07341A, •(2) JC Controls IG4400 Ionization Gauge Controllers s/n D2S1030-046; C8S1030-011, •MKS PDR-C-1C Power Supply s/n 92346105A, •MKS 660B10 Single Channel Digital Power Supply s/n 000812010, •Sycon STM-100/MF Thickness / Rate Monitor s/n unknown, •Leybold Turbotronik NT340M Turbo Pump Controller, •Anderson 2211101XPW Multi-function Digital Readout with Alarm s/n 97K92069, PLASMA REACTION VESSEL COMPONENTS: •(3) RF Plasma Products AM-5 Automatic Power Matching Network Modules s/n 1550-C187D(installed); 1548-C187D(installed); 1549-C187D(loose), •MKS Baratron Type 127 Pressure Transducer, •MKS Baratron 627B1 TBD1B Capacitance Manometer s/n 000868775, •MDC BRLM-275 High Temperature Rotary Motion Linear Feedthrough s/n 672002, •MDC AV-150 Angle Valve s/n 93-41123, •MDC BLM-275-2 Linear Motion Feedthrough, •MDC KAV-100 Angle Valve, •Leybold TurboVac 340M Magnetlager System s/n unreadable, •also includes Leybold TriVac D30A Vacuum Pump s/n 1392386326 MANUALS: •RF Plasma Products Power Supply Operators Manual for LF; RF; and HF Series Power Supplies (Rev 5.0), •RF Plasma Products AM-5 Automatic Matching Network Instruction Manual, •SyCon STM-100/MF Thickness / Rate Monitor User Manual (Rev A / May 1992), •MKS 247D Four Channel Readout User Manual (Rev A / July 1997), •Leybold TMP340M TurboPump and NT340M Converter Manual (Edition A), •Leybold TriVac"A" Dual Stage Rotary Vane Pump Manual (Edition L), •MKS Baratron 627B Absolute Pressure Transducerr Instruction Manual (Rev A / Jan 1999), •MKS PDR-C-1C/2C Power Supply Digital Readout Manual (Rev D / Dec 1997), •JC Controls IG4400 Ionization Gauge Controller Instruction Manual

This equipment is located in US