Used SPEC Equipment SPEC 3510PC For Sale

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Member ID 43773 - avatar

David S.

Member since: March 2011

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Name:
SPEC Equipment SPEC 3510PC
Listing Reference:
375535
Price:
Contact Me for Price
Location:
USA
Age:
2011
Description:

SPEC Equipment has developed a new and improved PC-based system, the SPEC 3510PC. This new system replaces the legacy GaSonics L3510 and surpasses it in performance and efficiency. The 3510PC is a customizable downstream photoresist removal system that utlizes time-tested process hardware components while replacing legacy control items and other obselete devices and hardware. With numerous modernizations such as newly-designed contemporary control system using a full-color Graphic User Interface, real-time graphing, saved sata recall, this system is unparalleled in the industry.


Features:
- PC-based system (Windows); Windows upgrade kit available
- Full-color, touch screen GUI with keyboard and touch pad
- Full diagnostics software
- Real-time graphics and feedback
- Exceptional reliability, serviceability, and performance.
- Requires only one DC power supply
- Unlimited process recipes
- SECS II Interface
- Field upgradable (<2 hours)
- Capable of up to 4 MFC's
- High throughput, excellent uniformity
- 75-200mm wafer capabilities

Specifications:
- Gas Flows: O2 = 1000 - 4000 sccm; N2/H2 = 100 - 1000 -- sccm; N2 = 100 - 500 sccm
- Pressure: 0.5 - >5.0 torr
- Platen temperature: 100 - 300°C
µwave Power: 0 - 1200 watts at 2.45 GHz/water cooled
- Lamp utilization: 0 - 100% (1000 watts)
- Throughput: 1.2µm softbaked

Typical Results:

- Descum: 45-60wph
- Photoresist: 45-60wph
- Implanted & Damaged: 45-60wpm
- Within a wafer: ±5% - 10%
- Wafer to wafer (average): ±5% - 10%
- Ash rate: up to 3.5µm/min
- System matching: ±10%
- Mobile Ion Concentration: 1^10/cm2 size of 1^11/cm2
- CV Shift: =0.1 volt
- Particle: <0.02cm2 size of 0.2µm

General Information:

- Substrate size: 3-8 inch/75mm-200mm
- Footprint: 30" (762mm) W x 38" (965mm) D x 58" (1473mm) H
- Electrical: 200 - 240 VAC, Single phase, 50/60 Hz., WYE configuration, 30 amp breaker
- Typical process gases: O2, N2/H2, N2 regulated 18-23 PSIG

Used equipment can sell very quickly. Contact the seller asap to discuss this SPEC Equipment SPEC 3510PC.

Make an Offer Ask the Seller a Question
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 43773 - avatar

David S.

Member since: March 2011

More listings by this seller

Make an Offer Ask the Seller a Question
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