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TEL P-8I Fully Automatic 200mm Wafer Prober
Asset Tag: 187181
TEL is a leading supplier of innovative semiconductor and FPD production equipment worldwide.
Detailed Configuration:
Model Item/TEL P-8
General:
Overall Size
1090mm(X)
965mm(Y)
930mm(Z)
Weight
815kg
Facility Requirement:
Power source
AC: 110 10V
50/60 Hz
AC:220 20V
50/60 Hz
Power Consumption
1.3KVA
Momentary interruption
retention time
50 m/sec
Air Pressure
0.4~0.7Mpa
Air flow rate
18 l/min
Vacuum
-400 to -700mm/Hg
Vacuum flow rate
15 l/min
Environmental Temp
25.3°C
Environmental Humidity
65% (Max)
Wafer Specification:
Diameter
5,6,8 inch
Thickness
150~1000 µm
Weight
110g (Maximum)
Die size
350~75000 µm
Stage:
Contact Accuracy( X,Y axis)
6µm (1995)
Contact Accuracy(Z axis)
5µm (1995)
Z chuck strength
20kg
Deflection Specification
@ 10kg 90mm from center 22µm (vertical)
16µm (horizontal)
Z Acceleration
1.0 G
Z Stroke
95mm (maximum)
Z Probe Range
65.8mm to 93.3mm
Z Velocity
40mm/s (maximum)
XY stage/platen:
Accuracy
Each axis 2µm
XY stroke
118mm(X)
230~-110mm(Y)
Maximum Speed
200 mm/sec
Acceleration
2.2G
X
2.2G
Y
2.2G
Resolution
0.4 µm
Chuck Mechanism
Rotation Range
7.0 degree
Angular Resolution
0.00022 degree
Pre-align Section:
Rotation Speed
360 degree/sec
Alignment accuracy XY
300µm
Theta Accuracy
0.17 degree
Control Resolution
1 degree
Alignment System
LED
Alignment:
Automatic self-teach & align
yes
Temperature Compensation
every wafer
Auto set-up camera:
Bridge camera
Macro mode magnification
0.41
viewing area
15.6 X 11.7mm
Micro mode magnification
17.8
viewing area
0.36 X 0.28mm
DPS Camera:
Resolution
Macro mode magnification
0.8
viewing area
5.85 X 7.8mm
Micro mode magnification
12
viewing area
0.39 X 0.52mm
Display:
Type
TFT LCD touch panel
Position
everything on LCD panel
Parameter storage
Remote set-up option
no
FDD
3.5" 1.6M
HDD
2.5" 352M
System function:
OCR
yes
Cassette map
yes
Real time wafer map
yes
Interface:
GPIB
yes
TTL
yes
Chuck:
Hot chuck
yes
Thermal Chuck
yes
Leakage and Noise
100pA
Residual Capacitance
2000pF
If interested, make me an offer.
This equipment is located in US
Manufacturer | Tel |
Model | P-8Fully Auto W |
Year | 2000 |
Country | USA |
Condition | Good |
Main category | Miscellaneous industrial equipment |
Subcategory | Probe |
ID | P31124016 |
Client type | Unknown |
On Kitmondo since | 2013 |
Number of listings | 0 |
Country | USA |
Last activity | Nov. 25, 2013 |