Used TEL P-8Fully Auto Wafe Prober For Sale

Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 51461 - avatar

Andrea T.

Member since: September 2013

More listings by this seller

Make an Offer Ask the Seller a Question
Name:
TEL P-8Fully Auto Wafe Prober
Listing Reference:
508732
Price:
Contact Me for Price
Location:
USA
Age:
2000
Description:

TEL P-8I Fully Automatic 200mm Wafer Prober

Asset Tag: 187181

TEL is a leading supplier of innovative semiconductor and FPD production equipment worldwide.

Detailed Configuration:

Model Item/TEL P-8
General:
Overall Size 1090mm(X)
965mm(Y)
930mm(Z)
Weight 815kg

Facility Requirement:
Power source AC: 110 10V
50/60 Hz
AC:220 20V
50/60 Hz
Power Consumption 1.3KVA
Momentary interruption
retention time 50 m/sec
Air Pressure 0.4~0.7Mpa
Air flow rate 18 l/min
Vacuum -400 to -700mm/Hg
Vacuum flow rate 15 l/min
Environmental Temp 25.3°C
Environmental Humidity 65% (Max)

Wafer Specification:

Diameter 5,6,8 inch
Thickness 150~1000 µm
Weight 110g (Maximum)
Die size 350~75000 µm

Stage:
Contact Accuracy( X,Y axis) 6µm (1995)
Contact Accuracy(Z axis) 5µm (1995)
Z chuck strength 20kg

Deflection Specification
@ 10kg 90mm from center 22µm (vertical)
16µm (horizontal)

Z Acceleration 1.0 G
Z Stroke 95mm (maximum)
Z Probe Range 65.8mm to 93.3mm
Z Velocity 40mm/s (maximum)

XY stage/platen:
Accuracy Each axis 2µm
XY stroke 118mm(X)
230~-110mm(Y)
Maximum Speed 200 mm/sec
Acceleration 2.2G
X 2.2G
Y 2.2G
Resolution 0.4 µm

Chuck Mechanism
Rotation Range 7.0 degree
Angular Resolution 0.00022 degree

Pre-align Section:
Rotation Speed 360 degree/sec
Alignment accuracy XY 300µm
Theta Accuracy 0.17 degree
Control Resolution 1 degree
Alignment System LED

Alignment:
Automatic self-teach & align yes
Temperature Compensation every wafer

Auto set-up camera:
Bridge camera
Macro mode magnification 0.41
viewing area 15.6 X 11.7mm
Micro mode magnification 17.8
viewing area 0.36 X 0.28mm

DPS Camera:
Resolution
Macro mode magnification 0.8
viewing area 5.85 X 7.8mm
Micro mode magnification 12
viewing area 0.39 X 0.52mm

Display:
Type TFT LCD touch panel
Position everything on LCD panel

Parameter storage
Remote set-up option no
FDD 3.5" 1.6M
HDD 2.5" 352M

System function:
OCR yes
Cassette map yes
Real time wafer map yes

Interface:
GPIB yes
TTL yes

Chuck:
Hot chuck yes
Thermal Chuck yes
Leakage and Noise 100pA
Residual Capacitance 2000pF

If interested, make me an offer.

Used equipment can sell very quickly. Contact the seller asap to discuss this TEL P-8Fully Auto Wafe Prober.

Make an Offer Ask the Seller a Question
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 51461 - avatar

Andrea T.

Member since: September 2013

More listings by this seller

Make an Offer Ask the Seller a Question
Make the Seller an Offer

Make the Seller an Offer

* required field

$ (USD)

Sending an offer to the seller does not constitute a legally binding agreement to purchase the equipment. However, please only make an offer if you are seriously interested.

Your offer will be emailed to the seller immediately. We will email you their reply as soon as we receive it.

Ask the Seller a Question

Ask the Seller a Question

* required field

Your question will be sent to the seller immediately and we will email you as soon as they reply.