Used Tokyo Electron Unity II85 TPA For Sale

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Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 47301 - avatar

Sales L.

Member since: December 2011

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Name:
Tokyo Electron Unity II85 TPA
Listing Reference:
449409
Price:
Contact Me for Price
Location:
USA
Age:
1996
Description:

GENERAL DESCRIPTION
Location: San Jose, CA
ToolID: 300013 (IN STOCK and 100% OWNED)
Serial Number: BBD232
Software Version: VER 3.40 - REV 206 - TIW -3.50b
System Power Rating: AC208V / 50Hz / 3-PHASE / 100kVA
Loading Configuration: Single Cassette/Single Wafer

Ch1: Casette Chamber 1
Ch2: Casette Chamber 2
Ch3: Transfer Chamber
Ch4: PA Chamber
Ch5: Process Chamber 1
Ch6: Process Chamber 2
Ch7: ATC Chamber


SYSTEM CONFIGURATION

1 Model Unity ver. Iie 85PPA Plasma Etching Equipment
a) Polymide Electrostatic Chuck hardware for wafer with Dual He cooling system
b) Cassette load lock protection for Process chamber
c) Two(2) Daihen RF Generator
d) Two(2) Daihen Automation Matching Network
e) Two(2) SMC Dual Channel High Temperature Chiller
f) Optical Wafer orientation system
g) Two(2) optimize chamber for 200mm wafer processing
h) Interface and control box for all pumps to mainframe
i) Two(2) Seiko Seiki Turbomolecular Pump
j) Single(1) Mechanical Robot Arm with Two(2) blades

2 End Point Detector (EPD-202)

3 Additional EMO for Dry Pump

4 Direct Pressure Monitor

5 Safety Spec include S2-93, CO Gas Port for Gas Box

Used equipment can sell very quickly. Contact the seller asap to discuss this Tokyo Electron Unity II85 TPA.

Make an Offer Ask the Seller a Question
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 47301 - avatar

Sales L.

Member since: December 2011

More listings by this seller

Make an Offer Ask the Seller a Question
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