Tokyo Electron Unity II85 TPA

Listing description

GENERAL DESCRIPTION
Location: San Jose, CA
ToolID: 300013 (IN STOCK and 100% OWNED)
Serial Number: BBD232
Software Version: VER 3.40 - REV 206 - TIW -3.50b
System Power Rating: AC208V / 50Hz / 3-PHASE / 100kVA
Loading Configuration: Single Cassette/Single Wafer

Ch1: Casette Chamber 1
Ch2: Casette Chamber 2
Ch3: Transfer Chamber
Ch4: PA Chamber
Ch5: Process Chamber 1
Ch6: Process Chamber 2
Ch7: ATC Chamber

SYSTEM CONFIGURATION

1 Model Unity ver. Iie 85PPA Plasma Etching Equipment
a) Polymide Electrostatic Chuck hardware for wafer with Dual He cooling system
b) Cassette load lock protection for Process chamber
c) Two(2) Daihen RF Generator
d) Two(2) Daihen Automation Matching Network
e) Two(2) SMC Dual Channel High Temperature Chiller
f) Optical Wafer orientation system
g) Two(2) optimize chamber for 200mm wafer processing
h) Interface and control box for all pumps to mainframe
i) Two(2) Seiko Seiki Turbomolecular Pump
j) Single(1) Mechanical Robot Arm with Two(2) blades

2 End Point Detector (EPD-202)

3 Additional EMO for Dry Pump

4 Direct Pressure Monitor

5 Safety Spec include S2-93, CO Gas Port for Gas Box

This equipment is located in US