Used Tokyo Electron Unity IIe 85 DD For Sale

Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:

Sales L.

Member since: December 2011

More listings by this seller

Make an Offer Ask the Seller a Question
Name:
Tokyo Electron Unity IIe 85 DD
Listing Reference:
449410
Price:
Contact Me for Price
Location:
USA
Age:
1997
Description:

GENERAL DESCRIPTION
Location: San Jose, CA
ToolID: 300020 (IN STOCK and 100% OWNED)
Wafer Diameter: 200mm
Serial Number: LLZ532
Software Version: 3.60
System Power Rating: AC208V, 50Hz / 60Hz, 3-Phase, 225A
Loading Configuration: Single Cassette / Single Wafer

PROCESS CONFIGURATION
POS DESCRIPTION GAS USED
1 Cassette Chamber 1 N2
2 Cassette Chamber 2 N2
3 Transfer Chamber N2
4 Process Chamber 1 N2 O2 Ar CF4 C4F6 C4F8 CHF4
5 Process Chamber 2 N2 O2 Ar CF4 C4F6 C4F8 CHF4
6 PA Chamber N2

SYSTEM CONFIGURATION
1 Model Unity Version IIe 85 DDA Plasma Etching Equipment
2 Ceramic Electrostatic 2 Chuck hardware for wafer, Dual He cooling system
3 Cassette load lock 2 protection for Process chamber
4 ENI RF Generator
5 ENI Special Automation Matching Network
6 Neslab Dual High Temperature Chiller
7 Optical Wafer Orientation System
8 Optimized Chamber for 200mm Wafer Processing
9 Mechanical Robot Arm with two(2) Blades
10 Seiko Seiki Turbo-molecular Pump
11 Additional EMO for Dry Pump
12 Maintenance Controller
13 Direct Pressure Monitor

Used equipment can sell very quickly. Contact the seller asap to discuss this Tokyo Electron Unity IIe 85 DD.

Contact the Seller
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:

Sales L.

Member since: December 2011

More listings by this seller

Contact the Seller
Contact the Seller

Contact the Seller

* required field

Your question will be sent to the seller immediately and we will email you as soon as they reply.