Canon MPA 600A MPA 600A

Listing description

1X
Mirror Projection
Auto Feeder: Single or double, cassette to cassette, backside wafer handling
Wafer Sizes:
4”, 5”, 6”
Mask Sizes:
5”, 6”, 7”
Resolution:
1.5 um
(using positive resist)
Illumination: 2kw high pressure mercury lamp
Wavelengths used: 365nm(i-line)
405nm(h-line)
436nm(g-line)
Intensity: (@ 1800watts power output)
4”wafer-more than 700mw,

5”wafer-more than 650mw,
6”wafer-more than 600mw
Intensity / Exposure Uniformity:
within +-3%
Constant Temperature Control – monitors and controls system temp. within +-.3 degrees C.
Automatic Alignment:
HeNe (633nm)
Laser Beam Scanning
Alignment Modes: Spot Beam / Sheet Beam
Accuracy: 3sigma <=.54um
MPA-600FA: 200 VAC, 3Phase, 6 kVA, 50/60Hz
Air Supply(CTC): 200 VAC, 3Phase, 8 kVA, 50/60Hz
CDA(Clean Dry Air)Pressure: minimum 6.5 kg/cm2
,

flow rate
130 lit/min
Vacum: 50 cmHg or more

This equipment is located in US