CDE RESMAP 178

Listing description

CDE RESMAP

MODEL 178

The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility. The system can do automated resistivity mapping for pieces to 8 inch wafers. The resistivity range is 2mOhm/Square to 5MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system.

Model 178
Type
Table Top
Wafer load
Manual
Wafer size
2” to 8”
Mini Environment
N/A
Probe Changer N/A
Aligner N/A
Size
12” x 19” x 10”
Range 1mO/? to 10MO/?
Accuracy
0.5%
Repeatability
0.02% static
Repeatability
0.1% dynamic

This equipment is located in US