Edwards Auto 500 Turbo

Listing description

The Auto 500 box chamber system is a versatile front loading thin film system for Research & Development or preproduction.
The chamber is mounted on a pedestal, housing the pumping stack. A rack panel next to the vacuum pedestal houses controls for vacuum and all thin film processes accessories. Three RF magnetron cathodes, two are 4 in. dia. and one is 3 in. dia.
Rotating Substrate Carrier: 11 in. dia.
Includes RF etch.
Crystal film thickness monitor.
Turbo pump with controller and roughing pump.
Inventory Number: 60795.

Please note that the refurbishment process does not begin until the equipment has been purchased. Sold fully checked out and refurbished by one of our technicians with our standard 3 month parts warranty.

This equipment is located in US