KLA-Tencor AIT I

Listing description

KLA-TENCOR AIT I PATTERNED SURFACE DEFECT INSPECTION SYSTEM consisting of:

- Model: AIT I Main System
- KLA-Tencor AIT I Mainframe
- Currently Configured for 6/150mm & 8/200mm Wafers
- Double Darkfield Inspection Tool
- SECS II/GEM Communication Interface
- Low Contact Chuck (AIT I)
- Multi Channel Collection Optics System with Independent Programmable Spatial Filters
- Pentium CPU with Windows NT Installed
- Wafer Transfer Area Housing Cover
- Wafer Handling Module
- High Voltage Electronics
- Front and Rear EMO’s with Covers
- Flat Panel Display for AIT
- Fold Down Keyboard Tray with Built In Mouse
- X/Y Drive/Controller Chassis and Motion Controller Card
- Blower Box (exhaust hoses not included)
- Operations Manual and Documentation

YOUTUBE VIDEO:

YouTube Video of this KLA AIT 1 in our Class 100 Cleanroom: http://www.youtube.com/watch?v=Erhp_7p1sEw&feature=player_embedded.

This equipment is located in US