KLA-Tencor AIT II

Listing description

KLA-TENCOR AIT II (200mm/300mm) PATTERNED SURFACE DEFECT INSPECTION SYSTEM consisting of:

- Model: AIT II
- Wafer Size: 200 and 300mm
- 150/200mm Open Handler or 300mm FOUP/FIM Handler
- Software Version 5.3.17.4
- Double Darkfield Inspection Tool
- SECS II / GEM Communication Interface
- Vacuum Chuck / Locator for 200mm Wafers
- Multi Channel Collection Optics System with Independent Programmable Spatial Filters
- Comes with Standard 10um Spot Sizes and also includes two expensive upgrades 5um and 7um Spot Sizes
- Wafer Transfer Area Housing Cover
- Wafer Handling Module
- Blower Box (exhaust hoses not included)
- Operations Manual and Documentation

This equipment is located in US