KLA-Tencor SP1 DLS

Listing description

KLA-TENCOR SURFSCAN SP1 DLS UNPATTERNED SURFACE INSPECTION SYSTEM consisting of:

- Model: SP1 DLS with Single Cassette / Port Handler (other handlers available)
- Open Cassette / Puck Handling
- Unpatterned Surface Inspection System
- Configured for 200/300mm Wafers
- Software Version 4.20.7199
- 0.050um Defect Sensitivity on Polished Bare Silicon
- Enhanced Rough Film Sensitivity
- Argon Ion Laser (488nm)
- Defect Map and Histogram with Zoom
- RTDC (Real Time Defect Classification)
- Map to Map
- Operator Interface
- Microsoft Windows NT 4.0 Operating System
- Blower Unit
- 18" TFT Flat Panel Display

Includes Options:
a) DIC
b) DIC Calibration
c) DBEnhancement
d) E40, E87, E90, E94
e) SECs/GEM (Comm Port)
f) SECS/GEM (HSMS)
g) Haze Analysis
h) Haze Normalization
i) Haze Normalization
j) X-Y Coordinates
k) Oblique

*ClassOne Equipment will use standard Polystrene Sphere (PSL) Test Wafers for Acceptance Testing. It is recommended that the Customer purchase one or multiple PSL Test Wafers for on-going Sensitivity Testing.*

KLA-TENCOR SURFSCAN SP1 REFURBISHMENT PROCESS consists of:

- Replace used Laser with New Laser
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
- Replace used Power Supply, as required
- Replacement or repair of any bad circuit board.
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.
- Optics assemblies cleaned and aligned to meet performance specifications or replaced as needed
- Electronic assemblies tested to meet performance specifications or replaced as needed
- Puck assembly rebuilt or replaced (if applicable)
- Replace old monitor with Brand New LCD Monitor
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- Performance specifications returned to original factory specifications
- Machine is fully tested to verify compliance to OEM specifications
- System transport locks installed; system prepared for shipment

This equipment is located in US