Used KLA-Tencor SP1 DLS For Sale

Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:

Byron E.

Member since: July 2011

More listings by this seller

Contact the Seller
Name:
KLA-Tencor SP1 DLS
Listing Reference:
622561
Price:
Contact Me for Price
Location:
Georgia, USA
Age:
Unknown
Description:

KLA-TENCOR SURFSCAN SP1 DLS UNPATTERNED SURFACE INSPECTION SYSTEM consisting of:

- Model: SP1 DLS with Single Cassette / Port Handler (other handlers available)
- Open Cassette / Puck Handling
- Unpatterned Surface Inspection System
- Configured for 200/300mm Wafers
- Software Version 4.20.7199
- 0.050um Defect Sensitivity on Polished Bare Silicon
- Enhanced Rough Film Sensitivity
- Argon Ion Laser (488nm)
- Defect Map and Histogram with Zoom
- RTDC (Real Time Defect Classification)
- Map to Map
- Operator Interface
- Microsoft Windows NT 4.0 Operating System
- Blower Unit

Includes Options:
a) DIC
b) DIC Calibration
c) DBEnhancement
d) E40, E87, E90, E94
e) SECs/GEM (Comm Port)
f) SECS/GEM (HSMS)
g) Haze Analysis
h) Haze Normalization
i) Haze Normalization
j) X-Y Coordinates
k) Oblique

*ClassOne Equipment will use standard Polystrene Sphere (PSL) Test Wafers for Acceptance Testing. It is recommended that the Customer purchase one or multiple PSL Test Wafers for on-going Sensitivity Testing.*


KLA-TENCOR SURFSCAN SP1 REFURBISHMENT PROCESS consists of:

- Replace used Laser with New Laser
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
- Replace used Power Supply, as required
- Replacement or repair of any bad circuit board
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.
- Optics assemblies cleaned and aligned to meet performance specifications or replaced as needed
- Electronic assemblies tested to meet performance specifications or replaced as needed
- Puck assembly rebuilt or replaced (if applicable)
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- System transport locks installed, system prepared for shipment

Used equipment can sell very quickly. Contact the seller asap to discuss this KLA-Tencor SP1 DLS.

Contact the Seller
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:

Byron E.

Member since: July 2011

More listings by this seller

Contact the Seller
Contact the Seller

Contact the Seller

* required field

Your question will be sent to the seller immediately and we will email you as soon as they reply.