KLA-Tencor Surfscan 6200

Listing description

KLA-TENCOR SURFSCAN 6200 SURFACE DEFECT INSPECTION SYSTEM consisting of:

- Model: 6200 Surfscan
- Bare Wafer Surface Defect Inspection System
- Wafer Setup: 8”/200mm
- Defect Sensitivity: 0.12um
- Defect Map and Histogram with Zoom
- Haze Map and Histogram with Zoom
- Argon Ion Laser (488nm)
- 2D Signal Integration
- Software:
+ Microsoft Windows 98, Version 4.2
+ Software Enhancement
+ Computer Upgrade
- Interactive Mouse and Keypad Controls
- LCD Color Monitor
- Pentium Computer
Software Capable for Wafer Map and Histogram
- Parallel Printer Port
- Up to 6 Custom Film Curves
- Blower Box
- 150mm Locator and X-Y Coordinates
- SECS II Communication Port
- Operations Manual and Documentation
- Power Supply will fit to the Customer Location
- Guaranteed to be Fully Refurbished to Meet OEM Specifications

This equipment is located in US