Used KLA-Tencor Surfscan 6220 For Sale

Asking Price
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Stock:
Only 1 Available on the Marketplace!
Seller:

Byron E.

Member since: July 2011

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Name:
KLA-Tencor Surfscan 6220
Listing Reference:
622571
Price:
Contact Me for Price
Location:
Georgia, USA
Age:
Unknown
Description:

KLA-TENCOR SURFSCAN 6220 DEFECT INSPECTION SYSTEM consisting of:

- Model: Surfscan 6220
- Automatic Surface Inspection System
- Bare Wafer Surface Defect Inspection System
- Substrate/Sizes: 2, 3, 4, 6 and 8 Wafer Capable
- Thickness: SEMI Standard Wafer Thickness
- Material: Any Opaque, Polished Surface which Scatters less than 5 percent of Incident Light
- Defect Sensitivity: 0.09 Micrometer Diameter PSL Sphere Equivalent with greater than 80 percent Capture Rate (0.112um @ 90%)
- Repeatability: Count Repeatability Error less than 0.5 percent at 1 Standard Deviation (Mean Count greater than 500, 0.364 mm dia. Latex Spheres)
- Accuracy: Count Accuracy better than 99 percent (verified with VLSI Standards’ Relative Standard)
- Throughput: 100 wph (200 mm) at 0.12 mm
- Contamination: Less than 0.005 Particles/cm2 greater than 0.15 mm dia. per single pass
- Cassette Handling: Single Puck Wafer Handling from two Cassettes (one Sender/Receiver, one Receiver)
- Illumination Source: 30 mW Argon-Ion laser, 488 nm Wavelength
- Operator Interface: Mouse and/or Dedicated User Keypad
- Operations Manual and Documentation
- Power Supply will fit to the Customer Location


OPTION AVAILABLE AT ADDITIONAL COST:


SECS/GEM Software and Interface Equipment Upgrade:
- SECS/GEM Software with Programmed Dallas Chip
- Interface Network Card and Cable
- SECS/GEM Manual for the Surfscan 6220 Tools
KLA-TENCOR SURFSCAN 6220 REFURBISHMENT PROCESS consists of:


- Replace used Laser with New Laser
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
- Replace used Power Supply, as required
- Replacement or repair of any bad circuit board.
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.
- Optics assemblies cleaned and aligned to meet performance specs or replaced as needed
- Electronic assemblies tested to meet performance specifications or replaced as needed
- Puck assembly rebuilt or replaced (if applicable)
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- System transport locks installed, system prepared for shipment
- Refurbishment carried out by KLA-Tencor Trained Technicians
- Upgrade Intel 75MHz processor to 200 MHz Pentium and Windows OS 98 SE
- Video of KLA 6XXX refurbished by ClassOne: http://www.youtube.com/watch?v=2qu9bnHPYLg

Used equipment can sell very quickly. Contact the seller asap to discuss this KLA-Tencor Surfscan 6220.

Contact the Seller
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:

Byron E.

Member since: July 2011

More listings by this seller

Contact the Seller

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