Used KLA-Tencor Surfscan 6400 For Sale

Asking Price
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Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 109 - avatar

Byron E.

Member since: July 2011

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Name:
KLA-Tencor Surfscan 6400
Listing Reference:
622572
Price:
Contact Me for Price
Location:
Georgia, USA
Age:
Unknown
Description:

KLA-TENCOR SURFSCAN 6400 SURFACE DEFECT INSPECTION SYSTEM
consisting of:

- Model: Surfscan 6400
- Bare Wafer Surface Defect Inspection System
- System set up for 150mm Wafers, up to 200mm capable
- Cassette Handling: Single puck handling from single cassette or platform
- Substrate Thickness: Automatic adjustment within 2 mm range
- Material: Any surface that scatters less than 90% of incident light
- Defect Sensitivity:
- Most Surfaces: Better than 0.20 um (depending upon surface quality)
- Polished Silicon: Better than 0.15 um at 95% capture rate
- Repeatability Error: Count repeatability error less than 1.5% at 1 standard deviation (Mean count greater than 500 for 0.364-um diameter latex spheres on bare silicon)
- Count Accuracy: Better than 99% as verified with VLSI Standards
- Relative Standard Spatial Resolution: 50 um spacing, minimum
- Dynamic Range: 0.1 um to 100 um in a single measurement
- Throughput:
- Up to 120 wafers per hour using 150 mm wafers
- Up to 95 wafers per hour using 200 mm wafers
- Contamination: Less than 0.5 particles/cm squared greater than 0.20 um diameter per single pass
- Illumination Source:
- 30 mW Argon-Ion laser
- 488 nm wavelength
- Operations Manual and Documentation
- Power: 208V, 1PH, 17A, 60Hz

Used equipment can sell very quickly. Contact the seller asap to discuss this KLA-Tencor Surfscan 6400.

Make an Offer Ask the Seller a Question
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 109 - avatar

Byron E.

Member since: July 2011

More listings by this seller

Make an Offer Ask the Seller a Question
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