KLA-Tencor Surfscan 6420

Listing description

KLA-TENCOR SURFSCAN 6420 DEFECT INSPECTION SYSTEM consisting of:

- Model: Surfscan 6420
- Bare wafer surface defect inspection system

Substrate Size:
- Wafer size capable: 100mm, 125mm, 150mm, & 200mm
- Customer select wafer size at time of order

Substrate Thickness:
- Adjustable up to 12 mm.
- Automatic adjustment within 2 mm range.

Material:
- Any surface that scatters less than 90% of incident light

Defect Sensitivity:
- Most Surfaces: Better than 0.12 um (depending upon surface quality).
- Polished Silicon: Better than 0.12 um at 95% capture rate.

Repeatability Error:
- Count repeatability error less than 1.5% at 1 standard deviation (Mean count greater than 500 for 0.364-um diameter latex spheres on bare silicon).

Throughput:
- Up to 120 wafers per hour using 150 mm wafers
- Up to 95 wafers per hour using 200 mm wafers

Contamination:
- Less than 0.5 particles/cm squared greater than 0.15 um diameter per single pass

Cassette Handling:
- Single puck handling from single cassette or platform. Sorting by robot optional.

Illumination Source:
- 30 mW Argon-Ion laser, 488 nm wavelength

Printer:
- New Data Printer

Operating Sofware:
- Windows 98 Operating Software

- Operations Manual and Documentation
- Power: 208V, 1PH, 17A, 60Hz

Refurbished to Factory Specifications consisting of:

- New Laser
- New Power Supply
- Clean or Replace Optics and Mirrors
- System calibrated to OEM specifications
- Optics Alignment
- Email us for full refurbishing process details!
- 6 months warranty and guarantee

This equipment is located in US