Novellus Concept-1 200

Listing description

Novellus Concept-1 200 PECVD

- Concept One 200mm Base System
- Micro-Contamination Package.
- Dual Frequency System with AE LF PDX 1400 Generator - CE Mark.
- New Generation Process 200mm Gas Box, 11 Chanel, Aera FCPA digital Mfc's with LOTO's.
- Standard Slot 200mm Heater Block.
- Assy, Foot Switch Controller - switch is foot activated for closure of the loadlock door.
- VCR Gasoline Interconnect.
- Upgraded External Heated Pendulum Valve
- Upgraded 586 Computer with Flash Drive.
- Upgraded Digital Pressure/ Temperature Control Unit.
- Upgraded Robot with 70V Motors and OEM 750.
- Upgraded Front Flat Panel Touchscreen.
- Upgraded AC and RF Ceramic Feedthru's.
- Upgraded Ferrofluidic Spindle.
- Upgraded AE Matching Network.
- Upgraded RF Detector Endpoint System.
- Upgraded RF Enclosure.
- Cooling Station For Plastic Cassette Compatibility.
- Megapak Power Supply.
- Sapphire Window.
- One Piece Loadlock Door Shaft.
- Standard Front Facia - Aqueous paint.
- SECS II communications interface.
- AE RFG5500 HF Generator - CE Marked, interlock standard.
- AC Remote Pump Interface for ACP pumps and with AE LF Generator.
- Main System Control Cable CA 99 - TBD
- RF Generator Control Cables for AE Generators - TBD
- HF RF Cable for 3 KW generator CA 57 - TBD
- LF RF Cable CA 102 -TBD
- Pump Control Cable to be used with ACP type interfaces - TBD

This equipment is located in US