Used Oxford Plasmalab 100 ICP For Sale

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Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 109 - avatar

Byron E.

Member since: July 2011

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Name:
Oxford Plasmalab 100 ICP
Listing Reference:
622552
Price:
Contact Me for Price
Location:
Georgia, USA
Age:
Unknown
Description:

OXFORD PLASMALAB 100 ICP ETCHER consisting of:

- Model: Plasmalab 100 ICP
- Inductive Coupled Plasma Source (180 ICP)
- Max Capable: 6/150mm diameter
- Current set up to run 4/100mm Wafers
- Chuck type: Mechanical Clamping
- Load-locked single chamber (ICP)
- Advanced Energy RFX600 13.56 Mhz RF Generator
- Advanced Energy RFX3000 13.56 Mhz RF Generator
- Alcatel ATH1300M Maglev Turbo Pump
- Alcatel ACT 1300M Controller
- HP Compaq Computer w/ Win NT 4.0
- PC2000NT Software Ver. 2.57.92
- LCD Monitor, Keyboard, and Mouse
- 2 Leybold Vacuum Pumps
- EMO Button
- Operations Manual
- Offered as Fully Refurbished!
- Manufactured in: 2002

GAS POD CONFIGURED WITH 6 MFCS consisting of:
- CHF3
- SF6
- O2
- Ar
- C4F8
- BCL3

CLASSONE REFURBISHMENT PROCESS FOR OXFORD RIE & ICP ETCHERS consisting of:

- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- System components carefully packed, labeled, and professionally crated.

Used equipment can sell very quickly. Contact the seller asap to discuss this Oxford Plasmalab 100 ICP.

Make an Offer Ask the Seller a Question
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 109 - avatar

Byron E.

Member since: July 2011

More listings by this seller

Make an Offer Ask the Seller a Question
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