Used Oxford Plasmalab 100 PECVD For Sale

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Stock:
Only 1 Available on the Marketplace!
Seller:

Byron E.

Member since: July 2011

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Name:
Oxford Plasmalab 100 PECVD
Listing Reference:
622553
Price:
Contact Me for Price
Location:
Georgia, USA
Age:
Unknown
Description:

OXFORD PLASMALAB 100 PECVD consisting of:

- Model: Plasmalab 100 PECVD
- Process: SiO2 and SiN deposition
- Max Wafer Size Capable: 8/200mm
- Single wafer process up to 8-inch wafer
- Load Locked Chamber
- 600W RF Generator
- Substrate Electrode: 205mm
- Shower Head Gas Inlet Optimised for PECVD
- 400° C Substrate Table
- System Computer
- System Chiller
- Alcatel 2033 Vacuum Pump (Loadlock Pump)
- Alcatel 2033 Vacuum Pump & RSV301B Blower (Chamber Pump)
- Oxford PC2000 Software
- Windows XP Operating Software (OS)
- Operations Manuals for Plasmalab 100 PECVD
- Manufactured in 2008!
- Serial number: 94-814892
- CE Certified

- Gas cabinet setup with 7 gases as follows:
1. CF4/O2 500sccm MKS 1179 viton seals
2. N2 2SLM MKS 1179 viton seals
3. N2O 1SLM MKS 1179 viton seals
4. HE 2SLM MKS 1179 viton seals
5. SiH4 50sccm MKS 1479 metal seals
6. PH3/AR 50sccm MKS 1479 metal seals
7. B2H6/AR 50sccm MKS 1479 metal seals

Used equipment can sell very quickly. Contact the seller asap to discuss this Oxford Plasmalab 100 PECVD.

Contact the Seller
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:

Byron E.

Member since: July 2011

More listings by this seller

Contact the Seller
Contact the Seller

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