Used Oxford Plasmalab 300 RIE For Sale

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Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 109 - avatar

Byron E.

Member since: July 2011

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Name:
Oxford Plasmalab 300 RIE
Listing Reference:
622554
Price:
Contact Me for Price
Location:
Georgia, USA
Age:
Unknown
Description:

OXFORD PLASMALAB 300 RIE / PE ETCHER SYSTEM consisting of:

- Model: 300 RIE / PE (PE Used for Failure Analysis)
- Up to 12/300mm Wafer Capable
- Setup to etch SiO2, Nitrides, or Polymers
- Platen: 380mm diameter
- Adixen ATH 400M Turbo Pump
- HP Computer with Pentium Dual Core Processor
- Generator Frequancy Range: RF (13.56MHz)
- Plasma mode: RIE/PE
- Wafer stage temperature: 0ºC – 80ºC
- Gas Box: 7 gas Lines
- Gas Box with 6 MKS 1179A MFC''s installed
- MFC 1 Gas: CHF3, Range: 100 SCCM
- MFC 2 Gas: CF4, Range: 100 SCCM
- MFC 3 Gas: O2, Range: 50 SCCM
- MFC 4 Gas: AR, Range: 100 SCCM
- MFC 5 Gas: N2, Range: 100 SCCM
- MFC 6 Gas: O2, Range: 200 SCCM
- Blower Box
- CE Marked
- EMO Button
- Chamber Up/Down Selector Switch
- Hoist Up/Down Buttons
- Operations Manuals & System Restore Disk
- Serial Number: 94-219912
- System Power: 208V, 3ph, 50/60Hz, 20A
- Fully refurbished to meet all OEM specifications
- Available for full inspection and demonstration!


REFURBISHED TO MEET OEM SPECIFICATIONS:

- All subassemblies are disassembled, cleaned, serviced, tested, reassembled and adjusted as follows:
- Chamber disassembled and receives full wet clean.
- All Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to OEM and customer specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- Transport locks installed, all system components carefully packed, labeled, and professionally crated.

Used equipment can sell very quickly. Contact the seller asap to discuss this Oxford Plasmalab 300 RIE.

Make an Offer Ask the Seller a Question
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 109 - avatar

Byron E.

Member since: July 2011

More listings by this seller

Make an Offer Ask the Seller a Question
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