Oxford Plasmalab 300 R

Listing description

OXFORD PLASMALAB 300 RIE / PE ETCHER SYSTEM consisting of:

- Model: 300 RIE / PE (PE Used for Failure Analysis)
- Up to 12/300mm Wafer Capable
- Setup to etch SiO2, Nitrides, or Polymers
- Platen: 380mm diameter
- Adixen ATH 400M Turbo Pump
- HP Computer with Pentium Dual Core Processor
- Generator Frequancy Range: RF (13.56MHz)
- Plasma mode: RIE/PE
- Wafer stage temperature: 0ºC – 80ºC
- Gas Box: 7 gas Lines
- Gas Box with 6 MKS 1179A MFC''s installed
- MFC 1 Gas: CHF3, Range: 100 SCCM
- MFC 2 Gas: CF4, Range: 100 SCCM
- MFC 3 Gas: O2, Range: 50 SCCM
- MFC 4 Gas: AR, Range: 100 SCCM
- MFC 5 Gas: N2, Range: 100 SCCM
- MFC 6 Gas: O2, Range: 200 SCCM
- Blower Box
- CE Marked
- EMO Button
- Chamber Up/Down Selector Switch
- Hoist Up/Down Buttons
- Operations Manuals & System Restore Disk
- Serial Number: 94-219912
- System Power: 208V, 3ph, 50/60Hz, 20A
- Fully refurbished to meet all OEM specifications
- Available for full inspection and demonstration!

REFURBISHED TO MEET OEM SPECIFICATIONS:

- All subassemblies are disassembled, cleaned, serviced, tested, reassembled and adjusted as follows:
- Chamber disassembled and receives full wet clean.
- All Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to OEM and customer specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- Transport locks installed, all system components carefully packed, labeled, and professionally crated.

This equipment is located in US