Used Oxford Plasmalab 80 Plus PECVD For Sale

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Stock:
Only 1 Available on the Marketplace!
Seller:

Byron E.

Member since: July 2011

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Name:
Oxford Plasmalab 80 Plus PECVD
Listing Reference:
622555
Price:
Contact Me for Price
Location:
Georgia, USA
Age:
Unknown
Description:

OXFORD PLASMALAB 80 PLUS PECVD consisting of:

- Model: Plasmalab 80 Plus
- Single PECVD chamber, non load-locked
- Heated Platen up to 400 C
- PC2000 Software
- Upgraded PLC
- RFX600A RF Generator
- Leybold D40 Vacuum Pump & Blower
- Neslab HX150 Chiller
- Operations Manual and Documentation

Gas Pod Currently Configured for:
1) CF4/20% O2 @ 500 sccm
2) NH3 @ 50 sccm
3) 5% SiH4/N2 @ 500 sccm
4) N2O @ 1 SLM

Used equipment can sell very quickly. Contact the seller asap to discuss this Oxford Plasmalab 80 Plus PECVD.

Contact the Seller
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:

Byron E.

Member since: July 2011

More listings by this seller

Contact the Seller
Contact the Seller

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