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OXFORD PLASMALAB 80 PLUS PECVD consisting of:
- Model: Plasmalab 80 Plus
- Single PECVD chamber, non load-locked
- Heated Platen up to 400 C
- PC2000 Software
- Upgraded PLC
- RFX600A RF Generator
- Leybold D40 Vacuum Pump & Blower
- Neslab HX150 Chiller
- Operations Manual and Documentation
Gas Pod Currently Configured for:
1) CF4/20% O2 @ 500 sccm
2) NH3 @ 50 sccm
3) 5% SiH4/N2 @ 500 sccm
4) N2O @ 1 SLM
This equipment is located in US
| Manufacturer | Oxford |
| Model | Plasmalab 80 Pl |
| Year | - |
| Country |
USA
|
| Condition | Good |
| Main category | PCB and SMT equipment |
| Subcategory | Other Semi Tools |
| ID | P50908058 |
| Client type | Machinery dealer |
| On Kitmondo since | 2011 |
| Number of listings | 0 |
| Country |
USA
|
| Last activity | Aug. 25, 2023 |
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