Used Oxford Plasmalab 80 Plus RIE For Sale

Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 109 - avatar

Byron E.

Member since: July 2011

More listings by this seller

Make an Offer Ask the Seller a Question
Name:
Oxford Plasmalab 80 Plus RIE
Listing Reference:
622556
Price:
Contact Me for Price
Location:
Georgia, USA
Age:
Unknown
Description:

OXFORD PLASMALAB 80 PLUS RIE ETCHER consisting of:

- Model: Plasmalab 80 Plus RIE / PE
- Single Chamber RIE, non-load locked
- Ideal for R&D reactive ion etch applications
- Configured for: 150mm wafers
- Platen: 200mm diameter
- Oxford PC2000 Software
- 300W Advanced Energy Hilight 133 RF Generator
- Edwards QDP80 Vacuum Pump & 250 Blower (professionally rebuilt)
- System Chiller (professionally rebuilt)
- System Dimensions: 23x40x59 (LxWxH)
- Operations Manual and Documentation
- Fully Refurbished to like-new condition (see below details)

GAS CONFIGURATION (Can be upgraded up to 6 Gases):
- O2
- He2

REFURBISHED TO EXCELLENT CONDITION consisting of:

- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.

Used equipment can sell very quickly. Contact the seller asap to discuss this Oxford Plasmalab 80 Plus RIE.

Make an Offer Ask the Seller a Question
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 109 - avatar

Byron E.

Member since: July 2011

More listings by this seller

Make an Offer Ask the Seller a Question
Make the Seller an Offer

Make the Seller an Offer

* required field

$ (USD)

Sending an offer to the seller does not constitute a legally binding agreement to purchase the equipment. However, please only make an offer if you are seriously interested.

Your offer will be emailed to the seller immediately. We will email you their reply as soon as we receive it.

Ask the Seller a Question

Ask the Seller a Question

* required field

Your question will be sent to the seller immediately and we will email you as soon as they reply.