Oxford Plasmalab 80 Pl

Listing description

OXFORD PLASMALAB 80 PLUS RIE ETCHER consisting of:

- Model: Plasmalab 80 Plus RIE / PE
- Single Chamber RIE, non-load locked
- Ideal for R&D reactive ion etch applications
- Configured for: 150mm wafers
- Platen: 200mm diameter
- Oxford PC2000 Software
- 300W Advanced Energy Hilight 133 RF Generator
- Edwards QDP80 Vacuum Pump & 250 Blower (professionally rebuilt)
- System Chiller (professionally rebuilt)
- System Dimensions: 23x40x59 (LxWxH)
- Operations Manual and Documentation
- Fully Refurbished to like-new condition (see below details)

GAS CONFIGURATION (Can be upgraded up to 6 Gases):
- O2
- He2

REFURBISHED TO EXCELLENT CONDITION consisting of:

- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.

This equipment is located in US