Semitool Spray Acid Tool

Listing description

SEMITOOL 1-CHAMBER SPRAY ACID TOOL (SAT) MODEL SAT-2080SCBU consisting of:

- Model: SAT-2080SCBU
- Spray Acid Tool (SAT)
- Single Chamber
- Up to 8/200mm Capable
- Capacity: Single 25-Wafer Cassette, 200mm wafers
- 2 Heated Chemical Tanks
- 2 Pneumatic Trebor Magnum 610 Pumps for chemical delivery
- 1 Hot DI Water Loop
- Heated N2 Delivery
- Capable of bulk fill hook-up (external)
- 3 Fill Vessels
- 3 AO Metering Pumps
- 2 Bottle Fill Connections
- Emergency Off (EMO)
- System Power: 208V, 3PH, 40Amp, 50/60Hz
- Refurbished by former Semitool factory trained technicians

SEMITOOL REFURBISHMENT PROCESS consists of:

- All subassemblies disassembled, cleaned, serviced, reassembled, tested
- All solenoid valves replaced with brand new
- All nozzles replaced with brand new
- Door Seal replaced with brand new
- All supply lines cleaned or replaced with new
- All seals cleaned or replaced with new
- All filters replaced with new
- Rotor Stop Positioners tested and replaced as necessary
- Window replaced with new (as necessary)
- Start/Stop Switches replaced with new, as necessary
- Blanket Heaters replaced with new, as necessary
- Nitrogen Pressure Sensors replaced as necessary.
- Bowl inspected and sent to be electropolished
- Any worn or damaged parts are repaired or replaced
- Machine covers replaced as needed
- All work performed by former Semitool factory trained technicians
- Machine is fully tested to verify compliance to specifications
- System de-installed following Semitool factory procedures
- System transport locks installed, system prepared for shipment
- System packed: all components carefully packed and labeled

This equipment is located in US