Solitec 5110-SJ Brush/J

Listing description

SOLITEC 5110-SJ BRUSH/JET SCRUBBER consisting of:

- Model: 5110-SJ
- Single chuck brush/jet scrubber
- Brush and jet scrubbing of wafers and masks
- Substrate sizes (max): 9 round, 6 square, 9 diagonal rectangular
- Digital timers with manual programming, relay logic control
- Speed control: adjustable from 200 to 8,000 rpm (+-/- 10 rpm control)
- Acceleration: variable from 1,000 to 40,000 rpm/sec
- Time: variable from 1 to 999 seconds in 1 sec increments
- Brush bristles: 0.005 inch diameter
- Jet pressure: varuable from 100 to 3,000 psi
- Standard process sequence:

a. Jet dispense - high pressure

b. External dispense #1 with brush

c. External dispense #2 with brush

d. External dispense #3 with internal brush rinse

e. Jet dispense - high pressure

f. N2 Spin Dry
- 1 pressurized tank for solvents included (additional can be ordered)
- Guaranteed to be in excellent condition

APPLICATIONS:
- Brush scrubbing and jet scrubbing of wafers and masks
- Contamination free cleaning of lenses and substrates
- For cleaning debris on difficult topography materials
- Lens and Quartz cleaning

FEATURES:
- Combination jet and brush cleaner
- 1.5hp high pressure pump, adjustable from 100 psi to 3,000 psi (for high pressue jet spray)
- Cup type nylon bristle brush is standard
- Interanl rinse in the brush
- N2 blow
- Micrometer heigh adjustement for brush
- House drain
- Vacuum interlock on chuck
- N2 motor purge
- Manual wafer loading

This equipment is located in US