Used SPTS MPX ICP PRO ETCHER For Sale

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Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 109 - avatar

Byron E.

Member since: July 2011

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Name:
SPTS MPX ICP PRO ETCHER
Listing Reference:
622544
Price:
Contact Me for Price
Location:
Georgia, USA
Age:
Unknown
Description:

SPTS MPX ICP ETCHER consisting of:

- Model: MPX PRO ICP
- Previously used for SiC (Silicon Carbide) Etch Process
- Single process chamber with manually loaded vacuum loadlock, with carousel wafer handler 2 wafers
- Inductively Coupled Plasma Source (ICP)
- Currently Configured for 4/100mm Wafers
- Capable of processing up to 8/200mm wafers
- Carousel Load Lock (2-Wafer Carousel)
- Heated Lower Chamber
- Load-Lock Chamber
- Helium Substrate Backside Cooling
- Weighted Clamp
- Edwards IH80 Vacuum Pump (Chamber)
- Alcatel Adixen ACG 28G Vacuum Pump (Load Lock)
- SMC Thermo Chiller
- Electronics Rack
- MKS Spectrum 1.5KW 13.56MHz RF Generator (Source)
- ENI ACG3B 13.56MHz RF Generator (Lower Electrode)
- Leybold MAG 1500 CT Turbo Pump
- System Cables (full set)
- SPTS PRO System Software
- Verity Instruments SD1024F Smart Spectrograph EPD
- User Manuals & Documentation
- All Passwords Needed to Operate the System
- Year of Manufacture: 2011
- Serial Number: MPO691


On Board Gas Box with following Gas Configuration:
- O2 @ 100 SCCM
- C4F8 @ 200 SCCM
- SF6 @ 200
- Ar @ 200 SCCM
- He @ 200 SCCM
- CF4 @ 200 SCCM
- CHF3 @ 100 SCCM
- NF3 @ 200 SCCM



FULLY REFURBISHED:

- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines purged.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- A software license may be obtained directly from SPTS
- SPTS does not certify any third party equipment refurbishments
- System components carefully packed, labeled, and professionally crated.

Used equipment can sell very quickly. Contact the seller asap to discuss this SPTS MPX ICP PRO ETCHER.

Make an Offer Ask the Seller a Question
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 109 - avatar

Byron E.

Member since: July 2011

More listings by this seller

Make an Offer Ask the Seller a Question
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