Used SPTS Multiplex ASE-HRM ICP PRO Etcher For Sale

Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 109 - avatar

Byron E.

Member since: July 2011

More listings by this seller

Make an Offer Ask the Seller a Question
Name:
SPTS Multiplex ASE-HRM ICP PRO Etcher
Listing Reference:
622545
Price:
Contact Me for Price
Location:
Georgia, USA
Age:
Unknown
Description:

SPTS MULTIPLEX ASE-HRM ICP PRO ETCHER consisting of:

Configuration:
- Model: Multiplex ICP PRO
- Process Chamber: ASE-HRM
- ASE-HRM chamber: High Rate Magnetic source achieves over three times the etch rates versus the original Bosch process
- Process: deep silicon etch
- Operating sofware: Windows 2000 Professional
- Currently set to process: 150mm
- Max wafer size capable: 200mm
- Year of Manufacture: 2004


Vacuum Load-lock For Single Chamber Multiplex systems (MESC):
- MACS loader (cassette to cassette loader)
- Carousel Load Lock (150mm)
- Chamber lid temperature control
- Fully automatic transfer of substrates between the load-lock and the process chamber
- Loader may be configured for substrates up to 200mm in diameter (currently set for 150mm)

Multiplex ICP Process Chamber:
- Production proven single wafer process chamber (aluminium)
- Balun Coil for High Rate Etch
- Leybold MAG 2000 CT Turbo Pump
- VAT Pendulum Valve
- Backside Helium Cooling
- Electro-Static Chuck (ESC)
- Remote sealed extracted gas box with orbitally welded gas lines
- Electronics cabinet
- LCD flat panel monitor
- Fully automatic multistep processing or manual operation
- ENI ACG-6B RF High Frequency
- Advanced Energy LF-5 Low Frequency
- Spectrum B-3013 3kW 13.56 MHz
- Edwards iH80 Vacuum Pump (Load Lock)
- Edwards iH600 Vacuum Pump (Chamber)
- 2 Affinity Chillers
- System Cables (full set)
- System Power: 208V, 60Hz, 3PH
- CE Certified

- Gas Box with gas configuration as follows:
- Ar2 - 100 sccm
- O2 - 100 sccm
- C4F8 - 300 sccm
- SF6 - 600 sccm
- N2 - vent


- Operations Manuals, Electrical Drawings and Documentation (Complete Manual Set)
- Refurbished to excellent condition by SPTS factory trained technicians.

Used equipment can sell very quickly. Contact the seller asap to discuss this SPTS Multiplex ASE-HRM ICP PRO Etcher.

Make an Offer Ask the Seller a Question
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 109 - avatar

Byron E.

Member since: July 2011

More listings by this seller

Make an Offer Ask the Seller a Question
Make the Seller an Offer

Make the Seller an Offer

* required field

$ (USD)

Sending an offer to the seller does not constitute a legally binding agreement to purchase the equipment. However, please only make an offer if you are seriously interested.

Your offer will be emailed to the seller immediately. We will email you their reply as soon as we receive it.

Ask the Seller a Question

Ask the Seller a Question

* required field

Your question will be sent to the seller immediately and we will email you as soon as they reply.