Used SPTS Multiplex ICP SR Etcher For Sale

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Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 109 - avatar

Byron E.

Member since: July 2011

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Name:
SPTS Multiplex ICP SR Etcher
Listing Reference:
622546
Price:
Contact Me for Price
Location:
Georgia, USA
Age:
Unknown
Description:

SPTS MULTIPLEX ICP SR ETCHER consisting of:


- Model: MESC ICP
- Process SiC, III-V, or Metal Etch
- Single process chamber with manually loaded vacuum loadlock
- Inductively Coupled Plasma Source (ICP)
- Currently Configured for 8/200mm Wafers
- Carousel Load Lock (Single-Wafer Carousel or multiple wafers on carrier)
- Heated Lower Chamber
- Load-Lock Chamber
- Helium Substrate Backside Cooling
- 200mm Weighted Clamp
- Ebara AA10N Vacuum Pump (Chamber)
- Ebara AAL10 Vacuum Pump (Load Lock)
- Affinity Chiller
- E-Rack
- 13.56MHz RF Generator (Source)
- 13.56MHz RF Generator (Lower Electrode)
- Leybold MAG 900 CT Turbo Pump
- System Cables (full set)
- User Manuals & Documentation
- Year of Manufacture: 2004
- Serial Number: 50543


On Board Gas Box with Following Gas Configuration:
- O2 @ 50 SCCM
- SF6 @ 100
- Ar @ 50 SCCM
- He @ 50 SCCM
- CF4 @ 100 SCCM
- CHF3 @ 100 SCCM
- NF3 @ 100 SCCM



FULLY REFURBISHED SYSTEM MEETING ORIGINAL SPECIFICATIONS:

- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines purged.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- A software license may be obtained directly from SPTS
- SPTS does not certify any third party equipment refurbishments
- System components carefully packed, labeled, and professionally crated.

Used equipment can sell very quickly. Contact the seller asap to discuss this SPTS Multiplex ICP SR Etcher.

Make an Offer Ask the Seller a Question
Asking Price
Contact Me for Price
Stock:
Only 1 Available on the Marketplace!
Seller:
Member ID 109 - avatar

Byron E.

Member since: July 2011

More listings by this seller

Make an Offer Ask the Seller a Question
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