SPTS VpX PECVD

Listing description

SPTS VPX PECVD SYSTEM consisting of:

-
STS VpX PECVD
- 1 x PECVD source
- Process:
SiO2 and SiN deposition.
- Gas configuration: SiH4, N2, N20, O2, C4F8
- Mixed Frequency configuration:

a) ENI ACG6B RF Power Supply, 600W ,13.56MHZ

b) Adtec 13.56MHz 2500W rated matching network

c) RFPP LF10, 1000W 380khz Coaxial Power LF Power Supply

d) Adtec 380KHz 2500W rated matching network
- Brooks MX400 Cluster Core
- 1 x Vacuum Cassette Station
- Setup for 8/200mm wafers
- Cassette to cassette auto-loading system
- Offers the most advanced technology for PECVD
- Windows Software control PC
- PLC Based Control System
- Touch-Screen Operator Interface
- Single Vacuumm Cassette Load-Lock & Cluster Core
- Central 4-port cluster core with Brooks Robot
- 1 x Brooks VCE5 Vacuum Cassette Handler
- Brooks Robot Arm Adapter for 1x200mm substrates
- Neslab HX150 Chiller (or equivalent)
- Edwards QDP80 with Blower (chamber pump)
- Edwards QDP40 (load lock pump)

- Year of Manufacture: 2008
- S/N: CPO133
- Operations Manual and Documentation

FULLY REFURBISHED SYSTEM MEETING ORIGINAL SPECIFICATIONS:

- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines purged.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- A software license may be obtained directly from SPTS
- SPTS does not certify any third party equipment refurbishments
- System components carefully packed, labeled, and professionally crated.

This equipment is located in US