Toho Technology FLX-2320-R

Listing description

Thin Film Stress Measurement System. Purchased new in late 2014 for a project that never developed. Like New. Industry standard capabilities for mass production and research facilities that demand accurate stress measurements on various films and substrates up to 200mm in diameter. Incorporating KLA Tencor’s patented Dual Wavelength technology, Toho FLX Series tools determine and analyze surface stress caused by deposited thin films. Comprehensive Data Analysis:Intuitive Windows 7 based analysis software displays any combination of stress, time, surface deflection, or reflected light intensity measurements. Calculation of biaxial modulus of elasticity, linear expansion coefficient, stress uniformity, and file subtraction. Trend plotting for Statistical Process Control (SPC). Calculation of water diffusion coefficient in dielectric films. Automatic recalculation of stress when film or substrate thickness is corrected. 2-D and 3-D views of wafer topography. Plotting of the measured stress-temperature curve. KLA Tencor’s patented dual wavelength technology, which enables the system to select the wavelength most suitable for challenging films such as silicon nitride. Providing fast and accurate measurements and enhanced ease of use at room temperature, the automated rotating stage model offers increased flexibility. The universal stage is recipe programmable for developing 3-D measurements and serves as an optimal monitoring device for verifying film uniformity across the entire 200mm substrate surface. Performance: Scan Range: Programmable up to 200mm. Measurement Range: 1 to 4,000MPa1. Repeatability: 1.3MPa2. Accuracy: Less than 2.5 percent or 1 MPa (whichever is larger).Minimum Radius: 2.0m. Maximum Radius: 33km. Wafer Sizes (mm): 25, 50, 75, 100, 150, 200mm. Minimum Scan Step: 0.02mm.
Inventory Number: 61009.

Please note that the refurbishment process does not begin until the equipment has been purchased. Sold fully checked out and refurbished by one of our technicians with our standard 3 month parts warranty.

This equipment is located in US