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ALCATEL 601E DRIE (DEEP REACTIVE ION ETCHER) consisting of:
- Model 601E Deep Reactive Ion Etcher
- Currently set up for 6" wafers
- Mechanical Clamp
- Backside He Cooling
- RFPP RF20S RF Generator
- RFPP LF-5 RF Generator
- Alcatel Adixen Turbo Pump
- Vacuum Pump & Chiller
- Pump
- Chiller
Current Gas Configuration:
- SF6
- C4F8
- CHF3
- O2
- AR
- N2
This equipment is located in US
Manufacturer | Alcatel |
Model | 601E |
Year | - |
Country | USA |
Condition | Good |
Main category | PCB and SMT equipment |
Subcategory | Other Semi Tools |
ID | P90210019 |
Client type | Machinery dealer |
On Kitmondo since | 2011 |
Number of listings | 0 |
Country | USA |
Last activity | Aug. 25, 2023 |