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Alcatel 601E


Availability: listing already sold

Listing description

ALCATEL 601E DRIE (DEEP REACTIVE ION ETCHER) consisting of:

- Model 601E Deep Reactive Ion Etcher
- Currently set up for 6" wafers
- Mechanical Clamp
- Backside He Cooling
- RFPP RF20S RF Generator
- RFPP LF-5 RF Generator
- Alcatel Adixen Turbo Pump
- Vacuum Pump & Chiller
- Pump
- Chiller

Current Gas Configuration:
- SF6
- C4F8
- CHF3
- O2
- AR
- N2

This equipment is located in US


Please note that this description may have been translated automatically.

Availability: listing already sold

Listing information

Manufacturer Alcatel
Model 601E
Year -
Country USA USA
Condition Good
Main category PCB and SMT equipment
Subcategory Other Semi Tools
ID P90210019

Availability: listing already sold

About the seller

Client type Machinery dealer
On Kitmondo since 2011
Number of listings 0
Country USA USA
Last activity Aug. 25, 2023