APPLIED MATERIALS (AMAT) VERASEM 3D AUTOMATED CD METROLOGY SYSTEM

Listing description

APPLIED MATERIALS (AMAT) VERASEM 3D AUTOMATED CD METROLOGY SYSTEM
Condition:Used
Brand: Applied Materials
Model: Varasem 3D Automated CD Metrology System
Includes: (1) Used Applied Materials (AMAT) Varasem 3D Automated CD Metrology System
Wafer Specification

Wafer Size: 200MM

Wafer Shape: SNNF (Semi Notch No Flat)

Wafer : 6”, 8” or 12”

Electron Optical System

Electron Gun Schottky emission source (fei)

Accelerating voltage 300V to 2000V

Probe Current Low 5pA / Medium 10pA / High 20pA

Electromagnetic Lens 3 Stage Electromagnetic Lens

System with boosting voltage Beam Deflector Module

Objective Lens

Scan Coil 2-Stage Electromagnetic Deflection (X- and Y-Axes)

Magnification 1,000x to 400,000x (100um to 0.25um FOV)

Wafer imaging ability Entire surface of 8” wafer

Asspect Ratio >14 : 1

Tilt Function 5 degrees (4 Direction)

Resolution 3nm (500V)

SECS/GEM Communication Interface

Automated Image Archiving Function Always / Online Setup / Never

Measurement Function Average/Maximum/Minimum/Contact Hole/

Line Edge Analysis/CH Analysis/Slope

Measurement Algorithm Normal / Foot / Threshold

For sale: APPLIED MATERIALS (AMAT) VERASEM 3D AUTOMATED CD METROLOGY SYSTEM (Used). Selling "as is, where is." We do not have the ability to test all equipment. This system was de-installed in working, operational condition.

This equipment is located in US