C171988 Kdf 603Nt Sputtering System, Cti Cryo-Torr 8 Cryopump + 8200 Compressor

Listing description

This KDF 603NT Sputtering System (Power: DC 12kW, RF 1.25kW; Utilities: 208VAC, 3Ph, 100A, 50-60Hz, 80-100psi Air, 60-90psi Water) looks to be in good cosmetic condition, showing some signs of wear.

Among other things, it features a CTI Cryo-Torr 8 Cryopump with 8200 Compressor, an Edwards E2M40 Two Stage Vacuum Pump (A36402982X5) with 2hp 190-230/380-460VAC 3Ph Motor, an Advanced Energy RFXII 1250 RF Power Supply, a Veeco AVC 1000 Automatic Valve Controller, and a Control Cabinet with Advance Energy MDX Pinnacle RF Power Supply, an APC PowerStack 450 UPS, a VAT PM-5 Adapter Pressure Controller, and a Programmable Logic Controller, as shown.

It is MISSING the Computer/Keyboard/Mouse, but still has the Flat Panel Monitor.

The "Au Upsilon" Gold Target has been removed, and is NOT included. The other two targets (W/10Ti and Tantalum) appear to be present, as shown in the photos.

This system was decommissioned by Clean Harbors, so all fluids have been drained, including the oil from the Edwards pump, and the Helium from the CTI compressor.

I have no way of testing this system, or any of its components, and it is being sold as-is.

An MKS 925 MicroPirani Transducer, a Balluff Linear Position Sensor, and a KDF Cryogenic Temperature Sensor Display, all on the back of the main unit, have been damaged (please see picture links below for detail).

Approximate overall unpacked dimensions of the Main Unit: 45"L x 79"W x 73"H.

Approximate overall unpacked dimensions of the Electronics Cabinet: 37"L x 24"W x 83"H.

Due to the size and weight of this system, a custom pallet or crate may be required to ship it, the cost of which will be the responsibility of the buyer.

This equipment is located in US