C84301 Ast Steag Mattson Shs 1000Vac Rtp Rapid Thermal Processor

Listing description

This AST RTP Rapid Thermal Processor (product: SHS, model no. 1000VAC, serial no. 96020197; 208VAC, 3Ph, 60Hz, 43kW) looks to be in cosmetic condition, showing some signs of wear. It is missing one of the back doors. One of the rack-mount chassis on the back of the system was partially pulled out when I received it, and the cover was removed. Upon closer inspection, some of the wires have been disconnected from the back of this module. I lack the knowledge and equipment to formally test this system, and it is being sold as-is. It comes with a box of accessories, including spare cables, valves, boards, etc., as shown. It includes two spare quartz chambers and two 100mm quartz wafer trays, as well as four manuals, as shown. One of the quartz chambers has a small chip out of one of its edges, and the tube on the top has been partially broken on the end (please see the photos for detail). This system comes with everything shown in the photos. I do not have any additional parts or accessories for it. If you do not see it in the photos, it is not included. Approximate overall unpacked dimensions: 62"H x 50"W x 75"L.

This equipment is located in US