Commonwealth Scientific ETCH DEP.

Listing description

Commonwealth Scientific Sputter System with 2015 Intlvac processor. The pumping system is made up of a roughing pump (Leybold Trivac D40B) (IMG 7550 and IMG 7548) and a cryogenic pump (Oxford Instruments Cryoplex 8) (IMG 7547 and 7546) . The compressor (for the cryopump) has excellent helium pressure (IMG 7545).

Chamber Size: Interior dimensions without coating shields = 18” (D) x 18”(W) x 24”(H)
Substrate Holder Size: 8.00” Diameter Planet
Water cooled: Yes
Ion Beam Source Type and Size: Commonwealth Scientific 6” RF (Primary) Commonwealth Scientific 4” RF (Secondary)
Current targets size and types: 6” Quartz 6” Tantalum Target

This equipment is located in CA