CVD AMAT Producer-SE

Manufacturer Amat
Model Producer-SE
Year 2006
Country Ireland Ireland
Condition Good
Main category PCB and Semiconductor
Subcategory Wafer & Semi Test Equipment
ID P90910017

Product Description

Description: CVD
Manufacturer: AMAT
Model: Producer-SE
Wafer Size: 300mm
Vintage: 2006
Serial Number:
Location: ASIA
Configuration: FI: 5.3
FI PC: Old Type
FI: Robot: Kawasaki x2 set Flex Controller unit: Missing

Chamber-A: UV-Cure Chamber-B: BD? Chamber-C: BD?

Gas-Lines (Old-Type)



UV Power supply Rack: ASTEX Generator

Missing Parts
Flex Controller unit, FI Robot blade parts
Ch-B&C Heater power filter, Ch-B&C Chamber IO Controller unit, Ch-B&C RPS, Ch-B&C Lid assy, Ch-B&C Process Kit
MF Motion controller CPU Board LFC(mDEOSx2, ATRTx2)
ChamberB & C Lid assy Xfer OTF Sensor Assy Xfer Robot Blade iPump, Chiller
etc.

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