DNS WS-820L

Listing description

Product Description
Wafer size 200mm
Wafer Flow Left to right
Cassette included
Components to include:
Main body – 1 unit
Loader – 1 unit
Unloader – 1 unit
Two robots for bath to bath transfer systems – one robot for wet wafers and one for dry wafers;
Robot arms to be Teflon coated quartz – 2 units

Double Sided Porous Silicon bath – 1 unit
Electrical Breaker Box for U.S. safety regulation
CD ROM Manuals
Material is FM-PVC to meet FM4910 criteria
System description:
Position 1 : Loader (CTC type)
Position 2 : CHCL (Robot Chuck Clean)
Position 3 : PS (Single-Double Sided Porous Silicon bath)
Position 4 : QDR (Quick Dump Rinse)
Position 5 : SD (Spin Dryer)
Position 6 : Unloader (CTC type)
Other components:
Notch Aligner
Wafer Counter

IPA replenishment function for PS bath(w/ anti explosion)
HF49% replenishment function for PS bath
Fire extinguisher system for PS bath

This equipment is located in IE