Ebara Frex300S

Manufacturer Ebara
Model Frex300S
Year 2005
Country Ireland Ireland
Condition Good
Main category PCB and Semiconductor
Subcategory Semiconductor Equipment
ID P81120164

EBARA Frex300S CMP
Vintage: 2005.11

1. Process (W), HMI, 2 x RECM, FI :3 x load port(Assyst), FI Robot(Yaskawa),
2. Polisher: G2 type (2 x Malema LFC)
3. Cleaner : Wet robot (Yaskawa), Chemical (HF, NH4O2),
Missing : 4 X Heads

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