EBARA Frex300S CMPVintage: 2005.11
1. Process (W), HMI, 2 x RECM, FI :3 x load port(Assyst), FI Robot(Yaskawa),2. Polisher: G2 type (2 x Malema LFC)3. Cleaner : Wet robot (Yaskawa), Chemical (HF, NH4O2),Missing : 4 X Heads
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