Evg 101 Advanced Spray Coating System

Listing description

EVG 101 ADVANCED SPIN COATING SYSTEM consisting of:

- Model: EVG 101
-Semi-Automatic, with Manual loading
-Suitable for wafer sizes 3" - 8" wafers (with proper chuck)
-Currently configured for 4"/100mm wafers
-One Coat Module
-Base frame for one resist processing module including all electronics, pneumatics, tubing for solvents, drain or dump container, and exhaust lines
-Manual loading and mechanical pre-aligner (pneumatically actuated)
-PC controlled with windows based graphical user interface
-Password protected access levels
-Coat chamber PTFE for spin coating
-Programmable rotational speed for substrate
-Programmable arm for resist dispense and topside EBR
- One Cybor pump
-Syringe dispense option included
-Spinner chuck for 4" wafers
-External Chemical cabinet with two solvents
- Previously used chemistry: 1813, 1827, acetone and IPA.
- Operations Manual and Documentation included.

This equipment is located in US