FCI SYSTEM Solvent Auto Wet Station

Listing description

Manufacturer: FCI SYSTEM
Model: Solvent Auto
Type: Wet Station
Version: 4 AND 6 INCH
Condition: excellent
Vintage: Jun 2011
Sale condition: as is where is
Quantity: 1

Comments:

-Still installed in the fab.

-Shut down and powered off.

-It can be inspected by appointment.

-The equipment is in excellent condition, with no missing parts.

-The equipment was lightly used in an R and D environment for around 2-3 years.

-The equipment ran 4 inch Sapphire wafers, but 6 inches will also be OK.

Auto Solvent Wet Station Configuration

4” or 6” Cassette Processing System

Automatic System with 1 Transfer Robot

2 Cassette stock for loader & unloader

Local supply system for Chemical Bath

Auto Extinguisher application

Auto Shutters to keep cross-contamination

Chemical bath auto cover

Preheating / Drain cooling tank system for chemical bath

Wafer: 4” and 6”

Treatment: 1 Cassette immersion type

Main body: Ivory PVC 8t (Frame SUS304 40*40*1.5t)

Chemical Supply: Local Chemical Auto Supply

Temperature Control: Setting temp. +/- 2°C

Chemical Drain: Line drain

System Control: PLC control, Operation panel: Touch screen

Safety Interlock: Emergency switch, Over-heating interlock, Leak sensor Door, Transfer, Chemical Supply, etc

Chemical consumption minimization trough compact bath design

Using PP sink & drain pipe (Solvent)

This equipment is located in KR