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This 2005 Defect Analyzer (DA) 300 DualBeam is for in-fab defect analysis. Includes installation, operational training and 90-day warranty.
• Electron source Schottky FEG, 200v–30kV
• In lens SE and BSE detector
• Ion source Ga 69/71 LMIS, 5–30kV
• Magnum Ion column: 22nA beam current
• CDEM with 7nm image resolution
• Windows OS and FEI UI; TSS networking computer to make IT happy
• Five-axis motorized comp-eucentric stage
• XYZ: 305 x 305 x 10 mm
• Tilt: – 10° to + 60°, Rotation: n x 360°
• Dual 300mm FOUPs
• Chamber scope for real time observation
• Gas Injection System (GIS): Max 4 injectors 2 included, chemistry of choice
• Vacuum System, oil free consisting of Column IGP x 3, air cooled Turbo and dry PVP
Additional Options Including:
• GIS chemistries
• Infrared camera for backside editing
• EDX
• Plasma Cleaner
This equipment is located in US
Manufacturer | FEI |
Model | DA300 |
Year | - |
Country | USA |
Condition | Good |
Main category | Miscellaneous industrial equipment |
Subcategory | Analyzer |
ID | P90705013 |
Client type | Machinery dealer |
On Kitmondo since | 2016 |
Number of listings | 0 |
Country | USA |
Last activity | Aug. 27, 2020 |