GaSonics Novellus PEP L3

Listing description

GASONICS NOVELLUS PEP L3510A Asher 200mm Configuration

Install type: Stand alone
Application: Photoresist removal
Software version: v3.71
Cassette interface: (2) Asyst Integrated SMIF
Wafer Handler: Dual Blade, Model: XU-RCM4700 rev 3

Left Module:
Model: PEP 3510A (L)
Config: 95-0481
Power: 208 V, 30 A, 1 phase/WYE, 60 Hz
Source / process kit type: Quartz
Platen type: Standard
Power supplies:
MWave PS: AGL C13170 (1250W)
Hours: 4057.6
Left Module Gas Config:
Gas # / Gas Flow (sccm) / MFC Mfgr. / MFC Model
1 O2, 4000, Brooks 5964
2 N2, 200, Brooks 5964
3 N2H2, 4000, Brooks, 5964

Right Module:
Model: PEP 3510A (R)
Config: 95-0482
Power: 208 V, 30 A, 1 phase/WYE, 60 Hz
Source / Process kit type: Quartz
Platen type: Standard
Power Supplies:
MWave PS: AGL C13170 (1250W)
Hours: 2454.8
Right Module Gas Config:
Gas # / Gas / Flow (sccm) / MFC Mfgr./ MFC Model
1 O2, 4000, Brooks 5964
2 N2, 200, Brooks 5964
3 N2H2, 4000, Brooks 5964

Main Section:
Model: PEP 3510A (H)
208 V, 150 A, 1 phase/WYE, 60 Hz
Machine hours: 35,504
SECS / GEM Interface

Main machine pre-check data backup: Yes
Chemical used: No
Toxic gas used: Yes
Gas line pump out: Yes
Gas line flush: Yes
Disconnection: internal connection: Yes
Process chamber pm: Yes
Pumping line clean: Yes
Gas line cap: Yes
Movable parts fixing and packing: Yes
1998 vintage.

This equipment is located in IE