HS-1200X-PEC4LV is a CE certified compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 2" or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high-quality mechanical pump. The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) to a solid state, and benefits:
• Lower temperature processing compared to conventional CVD.
• Film stress can be controlled by high/low frequency mixing techniques.
• Control over stoichiometry via process conditions.
• Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
1) Split Tube furnace
1200oC Max. working temperature for < 60 minutes
1100oC Max for continuous heating
30 segments programmable precision digital temperature controller
440 mm length single heating zone and 150 mm length constant temperate zone
High purity quartz tube optional from ( click optional bar to choose )
One pair of vacuum sealed flange with valves
2"OD x 1.7"ID x
3.14"OD x 2.83"ID x 48'' Length
Input power: 208 – 240V AC input, single phase at max. 4KW
Two zones split furnace -OTF1200X-II is optional at extra cost
2)Plasma RF Power Supply
5 -300W adjustable with ± 1% stability
13.56 MHz ±0.005% stability
RF Output Port:
50 O, N-type, female
This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange
3)Anti-corrosive Pressure Gauge
3.8x10-5 to 1125 Torr measurement range
Anti-corrosive, gas-type independent
High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
Fast atmospheric detection eliminates waiting time and shortens process cycle
Easy to exchange plug & play sensor element
4)Vacuum Pump and valve
Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 torr.
KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve
Digital vacuum pressure gauge and display are installed with the furnace
Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torrs
5)Optional Oilless Pump
Please order the oilless pump for zero contamination
4-Channelled Gas Mixing
Made of 316 stainless steel valve
Gas mixing tank: F80X120mm
600mm(L) x 745mm(W) x 700mm(H)
6" color touch screen control panel to make parameter setting at easy.
Touchscreen Control and PC remote switchable.
23W per channel
AC 220V/50Hz Single phase
MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
Built in PID Auto-Tune function with overheating & broken thermocouple protection.
Over temperature protection and alarm allows for operation without attendant(s).
+/- 1 ºC temperature accuracy.
RS485 Communications Port.
Advanced Temperature Control (Optional)
MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar.
You may upgrade the temperature controller to the Eurotherm 3204 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3204 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3204 temperature controller.
Furnace: 550mm(L) x 380mm(W) x 520mm(H)
2 Bottom Mobile case together: 1200mm(L) x 1200mm(W) x 1200mm(H)
Net weight: 220 lbs
Shipping weight: 350 lbs
One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
MTI reserves right to modify PECVD design at
any time without notice but promise that quality will meet the specifications above
Pallet #1: 48" x 40" x 60"
Pallet #2: 48" x 40" x 40"
Pallet #3: 48" x 40" x 40"
Pallet #4: 48" x 40" x 40"
12)Total Shipping Weight
500 kg (1100 lbs)
We are unable to take responsibility for custom delay & tax, as delivery time & tax all depend on shipping provider & Customs.
DO CONTACT US IF YOU HAVE ANY QUESTION.