KLA / TENCOR CD-SEM 8100XP

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Manufacturer Kla / Tencor
Model CD-SEM 8100XP
Year 2000
Country Russia Russia
Condition Good
Main category PCB and Semiconductor
Subcategory Semiconductor Equipment
ID P80628003
€34,000

Two systems are available for sale.
Used tools, in working order,
currently uninstalled, located in a fab in Moscow, Russia.
Electron guns missing.
Features:

Wafer size: 200 mm (8")
Module: 1 Etch / 1 Photo
Copper process: 1 Yes / 1 No
Process application: Measurement / CD measurement
Type of chuck: Standard
SMIF-Interface, loadports: Asyst-3LP
CE-Marked

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