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Manufacturer Kla / Tencor
Model CD-SEM 8100XP
Year 2000
Country Russia Russia
Condition Good
Main category PCB and Semiconductor
Subcategory Semiconductor Equipment
ID P80628003

Two systems are available for sale.
Used tools, in working order,
currently uninstalled, located in a fab in Moscow, Russia.
Electron guns missing.

Wafer size: 200 mm (8")
Module: 1 Etch / 1 Photo
Copper process: 1 Yes / 1 No
Process application: Measurement / CD measurement
Type of chuck: Standard
SMIF-Interface, loadports: Asyst-3LP

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