KLA-Tencor UV-1050

Listing description

Details:
KLA-TENCOR UV-1050 THIN FILM MEASUREMENT SYSTEM consisting of:

- Model: Prometrix UV-1050
- Thin Film Measurement Tool
- Broadband UV Optics
- Dual Beam Spectrophotometry
- Wafer Sizes: 100, 125, 150, and 200mm
- Stage Resolution: xy - 0.25μm, z - 0.025μm
- Focus: Automatic Focus on Measurement
Site
- Source: Broadband Xenon Arc Lamp
- Imaging System: Color Camera
- Applications include Polysilicon, UV Reflectivity, and Simultaneous Oxide and TiN Thickness for CMP Applications
- Windows NT
- Summit Software with GUI
- Simultaneous Multilayer and ESML Measures over 500 Discrete Wavelengths
- SECS II Interface
- Operations Manual for UV-1050

This equipment is located in US