Lam 4520

Listing description

MFG Date: 1993
EQUIPMENT DETAILS:
Currently configured for 200mm wafer sizes

MFG Date: 1993

Model: 4426B

Last PM: 11/11/2016

Install Type: Thru-the-wall (TTW)

Status Lamp

System software (App): Envision ver1.5.1

SECS I Interface Cassette Interface: (2) Hine 38F indexers Electrostatic Chuck (ESC)

Endpoint Detection: Monochromator 405nm / 520nm

Turbo: Seiko Seiki STP H200C

RF Match Type: LAM On-board

RF Generators: No

RF Generator: ENI OEM-650A

RF Hours: 402056

Remote RF Cart: No

ATM Passivation Module: No

Plasma LLK (PLL): No

High Conductance Manifold: No

Gas Box: Remote gas Box: No

Orbitally welded GB: Yes

Backside cooling MFC: Unit 1250A Gases:

#1: N2, 200 sccm, Unit 1200A #2: CHF3, 50 sccm, Unit 1200A #3: N2, 300 sccm, Aera #4: N2, 500 sccm, Unit UFC 1660 #5: CF4, 150 sccm, Unit 1200A #6: SF6, 150 sccm, Unit 1200A #7: He, 1 slm, Unit UFC 1660 #8: O2, 200 sccm, Unit UFC 1660 Pumps: Heated pumping manifolds: No Pump controller: iQ Series Entrance / Exit: Edwards iQDP-40 Main: Edwards iQDP-80 Chiller(s): (2) SMC HRS018-WN-20-M On-board AC Distribution type: Fused Power requirements: 208VAC, 3-Phase, 5-Wire

This equipment is located in IE