Lam Research TCP9600SE

Manufacturer Lam Research
Model TCP9600SE
Year -
Country Ireland Ireland
Condition Good
Main category PCB and Semiconductor
Subcategory Semiconductor Equipment
ID P81119063

We have a LAM TCP9600SE Metal Etcher available for turnkey to include refurb, install and warranty.

Refurb includes upgrade to ESC chuck and software upgrade with Envision.

VDS system is manual type(not autofill type, can not be upgraded)

Current Configuration:
Main body set up for 6‘‘ wafer
One process chambers
Configured for metal etching process
One ELL CHAMBER
One DSQ chamber
One APM chamber
Cassette to cassette auto-handing system
150mm STD- chuck
Chuck type: STD-clamp
DSQ HEATER TYPE:paddle
STD-EPD system
STD- BACK HELIUM SYSTEM
STD-HEATER CONTROL SYSTEM (12 CHANNEL)
System type: classic
three RF Generators
ONE TCU:MW TCU
AC rack
Three
Dry pumps

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Category: PCB and Semiconductor
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